Methods of fabricating vertical carbon nanotube field effect transistors for arrangement in arrays and field effect transistors and arrays formed thereby

ABSTRACT

A method for forming carbon nanotube field effect transistors, arrays of carbon nanotube field effect transistors, and device structures and arrays of device structures formed by the methods. The methods include forming a stacked structure including a gate electrode layer and catalyst pads each coupled electrically with a source/drain contact. The gate electrode layer is divided into multiple gate electrodes and at least one semiconducting carbon nanotube is synthesized by a chemical vapor deposition process on each of the catalyst pads. The completed device structure includes a gate electrode with a sidewall covered by a gate dielectric and at least one semiconducting carbon nanotube adjacent to the sidewall of the gate electrode. Source/drain contacts are electrically coupled with opposite ends of the semiconducting carbon nanotube to complete the device structure. Multiple device structures may be configured either as a memory circuit or as a logic circuit.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of application Ser. No. 10/777,576,filed Feb. 12, 2004, which is hereby incorporated by reference herein inits entirety.

FIELD OF THE INVENTION

The invention relates to semiconductor device fabrication and, moreparticularly, to methods of constructing vertical carbon nanotube fieldeffect transistors and arrays thereof, and device structures and arraysof device structures formed by such methods.

BACKGROUND OF THE INVENTION

Traditional field effect transistors (FET's) are familiar conventionaldevices commonly incorporated as a fundamental building block into theintricate circuitry of integrated circuit (IC) chips. Downward scalingof FET dimensions has improved circuit performance and increased thefunctional capability of FET's packed on an IC chip. However, continueddimensional reductions may be hampered by the size limitationsassociated with traditional materials and the costs associated withlithographic patterning.

Carbon nanotubes are nanoscale high-aspect-ratio cylinders consisting ofhexagonal rings of carbon atoms that may assume either a semiconductingelectronic state or a conducting electronic state. A conventional methodfor synthesizing carbon nanotubes suitable for forming FET arraysutilizes a chemical vapor deposition (CVD) process. Specifically, theCVD process directs a flow of a carbonaceous reactant to a catalystmaterial located on the planar substrate, where the reactant iscatalyzed to synthesize the carbon nanotubes. The carbon nanotubes growand lengthen by insertion of activated carbon atoms at the interfacewith the catalyst material. The carbon nanotubes are then harvested foruse in various end applications.

FET's have been successfully fabricated using a semiconducting carbonnanotube as a channel region and forming contacts at opposite ends ofthe semiconducting carbon nanotube extending between a gold sourceelectrode and a gold drain electrode situated on the surface of asubstrate. A gate electrode is defined in the substrate underlying thecarbon nanotube and generally between the source and drain electrodes.An oxidized surface of the substrate defines a gate dielectric situatedbetween the buried gate electrode and the carbon nanotube.

Nanotube FET's should switch reliably while consuming significantly lesspower than a comparable silicon-based device structure due to the smalldimensions of the carbon nanotube. Such FET's have been successfullyformed under controlled laboratory conditions by manipulating singlesemiconducting carbon nanotubes using an atomic force microscope forprecision placement between the source and drain electrodes. NanotubeFET's have also been formed by coincidental placement of a singlesemiconducting carbon nanotube between the source and drain electrodesfrom among a randomly dispersed group of semiconducting carbonnanotubes.

Large arrays of FET's are demanded in the fabrication and massproduction of IC chips. Conventional manipulation or coincidentalplacement of carbon nanotubes cannot satisfy the requirements for massproduction. Unfortunately, as the carbon nanotubes lengthen, the flow ofCVD reactant(s) to the catalyst material becomes restricted, which slowsor even halts nanotube synthesis. In certain FET designs, the catalystmaterial may be located at the base of a high-aspect-ratio opening,which further restricts reactant flow.

What is needed, therefore, is a method of synthesizing an array of FET'sincorporating carbon nanotubes compliant with mass production techniquesand in which a CVD nanotube-synthesis process transpiring at a catalystmaterial integrated into the FET structure is not limited by reactantflow restrictions.

SUMMARY OF THE INVENTION

In accordance with the invention, a semiconductor device structureincludes a gate electrode with a vertical sidewall covered by a gatedielectric and a semiconducting carbon nanotube extending vertically ata location adjacent to the vertical sidewall of the gate electrode. Asource is electrically coupled with one end of the semiconducting carbonnanotube and a drain is electrically coupled with an opposite end of thesemiconducting carbon nanotube. Multiple semiconductor device structuresmay be arranged in an array and interconnected together either as amemory circuit or as a logic circuit.

In another aspect of the invention, a method is provided for fabricatinga device structure. The method includes forming a stacked structureincluding a plurality of catalyst pads each coupled electrically with asource contact, a gate electrode layer, and an insulating layerseparating the gate electrode layer from the plurality of catalyst pads.The method further includes partitioning the stacked structure to definea plurality of gate electrodes in the gate electrode layer in whichadjacent gate electrodes are separated by a reactant path and each ofthe plurality of catalyst pads is at least partially exposed to thereactant path at a location proximate a vertical sidewall of acorresponding one of the plurality of gate electrodes. At least onesemiconducting carbon nanotube is synthesized on each of the pluralityof catalyst pads with a chemical vapor deposition process that involvesdirecting a reactant through the reactant path to each of the pluralityof catalyst pads.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are incorporated in and constitute apart of this specification, illustrate embodiments of the invention and,together with a general description of the invention given above, andthe detailed description of the embodiments given below, serve toexplain the principles of the invention.

FIG. 1A is a top view of a portion of a substrate;

FIG. 1B is a cross-sectional view taken generally along lines 1B-1B inFIG. 1A;

FIG. 2A is a top view of the substrate of FIG. 1A at a subsequentfabrication stage;

FIG. 2B is a cross-sectional view taken generally along lines 2B-2B inFIG. 2A;

FIG. 3A is a top view similar to FIG. 2A at a subsequent fabricationstage;

FIG. 3B is a cross-sectional view taken generally along lines 3B-3B inFIG. 3A;

FIG. 4A is a top view similar to FIG. 3A at a subsequent fabricationstage;

FIG. 4B is a cross-sectional view taken generally along lines 4B-4B inFIG. 4A;

FIG. 5A is a top view similar to FIG. 4A at a subsequent fabricationstage;

FIG. 5B is a cross-sectional view taken generally along lines 5B-5B inFIG. 5A;

FIG. 6A is a top view similar to FIG. 5A at a subsequent fabricationstage;

FIG. 6B is a cross-sectional view taken generally along lines 6B-6B inFIG. 6A;

FIG. 7A is a top view similar to FIG. 6A at a subsequent fabricationstage;

FIG. 7B is a cross-sectional view taken generally along lines 7B-7B inFIG. 7A;

FIG. 8A is a top view similar to FIG. 7A at a subsequent fabricationstage;

FIG. 8B is a cross-sectional view taken generally along lines 8B-8B inFIG. 8A;

FIG. 9A is a top view similar to FIG. 8A at a subsequent fabricationstage;

FIG. 9B is a cross-sectional view taken generally along lines 9B-9B inFIG. 9A;

FIG. 10A is a top view similar to FIG. 9A of a device structure inaccordance with an alternative embodiment of the invention;

FIG. 10B is a cross-sectional view taken generally along lines 10B-10Bin FIG. 10A;

FIG. 11A is a top view similar to FIG. 10A of a device structure inaccordance with an alternative embodiment of the invention;

FIG. 11B is a cross-sectional view taken generally along lines 11B-11Bin FIG. 11A;

FIG. 12A is a top view similar to FIG. 11A of a device structure inaccordance with an alternative embodiment of the invention; and

FIG. 12B is a cross-sectional view taken generally along lines 12B-12Bin FIG. 12A.

DETAILED DESCRIPTION OF SPECIFIC EMBODIMENTS

The invention in its various embodiments provides methods for formingarrays of field effect transistors (FET's) incorporating semiconductingcarbon nanotubes as a channel region and, optionally, conducting carbonnanotubes as a component of a gate contact and/or a source contact.Adjacent FET's are spaced apart such that, as the carbon nanotubeslengthen, the flow of CVD reactant(s) to a catalyst material supportingnanotube synthesis does not become restricted. Because the nanotubesynthesis is unencumbered by significant flow restrictions, the carbonnanotubes may be grown at a higher rate to a greater length, and arraysof FET's may be formed by appropriate mass production techniques.

With reference to FIGS. 1A and 1B, a layer stack 10 is formed on asubstrate 12 covered by multiple parallel rows or stripes of aconductive layer 14 composed of a conducting material that participatesin a source/drain connection in the completed device structure 54 (FIGS.9A and 9B). Substrate 12 may be composed of any suitable substratematerial, including but not limited to silicon (Si), gallium arsenide(GaAs), glasses, silicon carbide (SiC), and silicon dioxide (SiO₂). Ifsubstrate 12 is composed of a conducting material, then it must becovered by an insulating material (not shown) so that the discretedevice structures 54 are not shorted together after fabrication. Thelayer stack 10 includes a patterned layer of catalyst pads 16 separatedfrom a gate conductor 18 by an insulating layer 20. The gate conductor18 consists of a blanket layer of a conductive material, such ashighly-doped polycrystalline silicon (polysilicon) deposited by a lowpressure chemical vapor deposition (LPCVD) process. The insulating layer20 is formed from a thin film of an insulating material, such as SiO₂,silicon nitride (Si₃N₄) or silicon oxynitride (SiO_(x)N_(y)), depositedby any suitable conventional deposition technique. The material formingsubstrate 12, conductive layer 14 and gate conductor 18 do not catalyzesynthesis of carbon nanotubes.

The catalyst pads 16 are formed by depositing a blanket layer of thecatalytic material by any conventional deposition technique including,but not limited to, a chemical vapor deposition (CVD) process usingsuitable precursors such as metal halides and metal carbonyls,sputtering, and physical vapor deposition (PVD), and then employing astandard lithographic and subtractive etch process to pattern theblanket layer. Catalyst pads 16, which are electrically conducting, arepositioned so that the stripes of conductive layer 14 are not shorted toone other. The catalytic material in catalyst pads 16 is any materialcapable of nucleating and supporting the synthesis or growth ofsemiconducting carbon nanotubes when exposed to appropriate reactantsunder chemical reaction conditions suitable to promote nanotube growth.Suitable catalytic materials for catalyst pads 16 include, but are notlimited to, iron, nickel, cobalt, compounds of these metals such asmetal oxides and metal silicides, and alloys of these metals. In thecase of metal oxides, it may be necessary to perform a reduction toaccess or activate the catalyst material. The catalyst material or amaterial alloyed with the catalyst material, such as transition metals,potassium, rubidium, or arsenic pentafluoride (AsF₅), may also becapable of selectively diffusing from catalyst pad 16 into synthesizedsemiconducting carbon nanotubes 42 (FIGS. 7A and 7B), under appropriateconditions, for increasing the electrical conductivity of the diffusedregion, as explained below.

References herein to terms such as “vertical”, “horizontal”, etc. aremade by way of example, and not by way of limitation, to establish aframe of reference. The term “horizontal” as used herein is defined as aplane parallel to the conventional plane or surface of substrate 12,regardless of orientation. The term “vertical” refers to a directionperpendicular to the horizontal, as just defined. Terms, such as “on”,“above”, “below”, “side” (as in “sidewall”), “higher”, “lower”, “over”,“beneath” and “under”, are defined with respect to the horizontal plane.It is understood that various other frames of reference may be employedwithout departing from the spirit and scope of the invention.

With reference to FIGS. 2A and 2B in which like reference numerals referto like features in FIGS. 1A and 1B and at a subsequent fabricationstage, an insulating layer 24 is deposited on the gate conductor 18 andpatterned by a standard lithographic and etch process. The insulatinglayer 24 is formed of a thin film of an insulating material, such asSiO₂, Si₃N₄ or SiO_(x)N_(y), that does not catalyze synthesis of carbonnanotubes. Insulating layer 24 may be deposited by any suitableconventional deposition technique. Insulating layers 20 and 24 should bethin for optimizing device performance.

With reference to FIGS. 3A and 3B in which like reference numerals referto like features in FIGS. 2A and 2B and at a subsequent fabricationstage, the layer stack 10 (FIGS. 2A and 2B) is patterned to form anarray of substantially identical, parallel columnar gate electrodes 25running orthogonally to the stripes of conductive layer 14 thatcooperate to define a rectangular grid of device structures 54 (FIGS. 9Aand 9B). To that end, vertically-aligned portions of the insulatinglayer 24 and the gate conductor 18 are removed by a standardlithographic and etch process that also exposes regions of the catalystpads 16 and conductive layer 14. Insulating layer 20 electricallyisolates each gate electrode 25 from the conductive layer 14. In amemory application, each of the gate electrodes 25 defines a word line26 for selecting all device structures 54 in a corresponding column ofdevice structures 54. Although only two gate electrodes 25 are shown inFIGS. 3A and 3B, the invention is not so limited, as any number of gateelectrodes 25 may be defined in gate conductor 18 to comply with aspecific circuit design.

Adjacent stripes of the conductive layer 14 are each separated by one ofmultiple parallel stripes of insulating layer 12, which are exposed whenportions of the insulating layer 20 and gate conductor 18 are removed.The stripes of conductive layer 14 define bit lines 27 for selecting alldevice structures 54 in a corresponding row of device structures 54. Theword lines 26 and bit lines 27 are interfaced with suitable circuitry(not shown) to read or address a specific device structure 54 at theintersection of a selected word line 26 and a selected bit line 27.Hence, an array of memory device structures 54 is defined in accordancewith this embodiment of the invention.

With reference to FIGS. 4A and 4B in which like reference numerals referto like features in FIGS. 3A and 3B and at a subsequent fabricationstage, a temporary spacer 28, which may be composed of SiO₂ orSiO_(x)N_(y), is formed that covers the vertical surfaces of catalystpads 16, insulating layer 20, and the gate electrodes 25. The thicknessor width of temporary spacer 28 determines, after etching, a catalystsite or active area 34 of each of the catalyst pads 16 that iseventually exposed to the reactant(s) for synthesizing carbon nanotubes.The size of the active area 34 is believed to be a factor in determiningthe dimensions of the semiconducting carbon nanotubes 42 (FIGS. 7A and7B) synthesized thereon. In certain embodiments of the invention, thewidth of the active areas 34 is on the order of a few nanometers.

With reference to FIGS. 5A and 5B in which like reference numerals referto like features in FIGS. 4A and 4B and at a subsequent fabricationstage, the active areas 34 are defined by removing portions of thecatalyst pads 16 not masked by the temporary spacer 28 using either awet or dry etch process as understood by persons of ordinary skill inthe art. Active areas 34 are revealed by removing the temporary spacer28 with either a wet or dry etch process as understood by persons ofordinary skill in the art. Following the etch processes, the resultantstructure includes an array of active areas 34 each having a desiredfeature size. One column of active areas 34 is aligned with each gateelectrode 25.

In an alternative embodiment of the invention, the catalyst pads 16 aredeposited with a monolayer thickness and annealed to createnanocrystals. The smaller nanocrystals may lead to the synthesis ofsmaller diameter nanotubes 42 (FIGS. 7A and 7B) and may favor thesynthesis of single-wall carbon nanotubes 42.

With reference to FIGS. 6A and 6B in which like reference numerals referto like features in FIGS. 5A and 5B and at a subsequent fabricationstage, an insulating layer 38 is applied to the vertical surfaces ofeach gate electrode 25. The insulating layer 38 may be composed of anysuitable insulating or dielectric material, such as SiO₂ either grown byan oxidation process or deposited by a CVD process. The insulating layer38 serves as a gate dielectric in the completed device structure 54(FIGS. 10A and 10B). The word lines 26 are arranged as parallel columnsand the bit lines 27 are arranged in parallel rows with adjacent wordlines 26 separated by one of a corresponding plurality of open volumesor spaces 39 that supply reactant flow paths to the active areas 34. Incertain embodiments of the invention, the ratio of the area defined byopen spaces 39 to the total area viewed in a direction normal orperpendicular to substrate 12 is between about 20 percent and about 50percent, preferably about 33 percent. The formation of insulating layer38 may oxidize or otherwise inactivate the catalyst material formingactive areas 34. The oxidized catalyst material may be reduced usinghydrogen or forming gas at a temperature of about 300° C. to about 600°C., which is selected to avoid potentially reducing insulating layer 38.

With reference to FIGS. 7A and 7B in which like reference numerals referto like features in FIGS. 6A and 6B and at a subsequent fabricationstage, carbon nanotubes 42 are grown or synthesized on active areas 34by a CVD process. The length of the carbon nanotubes 42 is typicallyabout 50 nm to about 500 nm, which corresponds approximately to thevertical height of the gate electrode 25. An optional spacer (not shown)may be applied about the vertical surfaces of the active areas 34 ofcatalyst pads 16 to eliminate nanotube synthesis from those verticalsurfaces, which might potentially occlude the open spaces 39 and/orunwantedly create undesirable electrical connections by extendingbetween adjacent word lines 26 or adjacent bit lines 27. If theconductive layer 14 exposed in open spaces 39 is composed of aconducting material that supports nanotube synthesis, a layer (notshown) of a temporary masking material must be applied to cover theexposed horizontal surfaces of conducting layer 14 during nanotubesynthesis and then removed following nanotube synthesis.

Each active area 34 supports the synthesis of one or more semiconductingcarbon nanotubes 42. In one embodiment of the invention, the nanotubesynthesis conditions and reactant(s) and/or the types of catalystmaterial constituting catalyst pads 16 are chosen to selectively growsemiconducting carbon nanotubes 42 on active areas 34. Alternatively,semiconducting carbon nanotubes 42 on active areas 34 may bepreferentially selected from among a collection of as-grown nanotubes 42including both conducting and semiconducting molecular structures by,for example, applying a current sufficiently high to destroy nanotubes42 having a conducting molecular structure. An exemplary approach forpost-synthesis destruction of conducting carbon nanotubes is describedin commonly-assigned U.S. Pat. No. 6,423,583, which is herebyincorporated by reference herein in its entirety.

Carbon nanotubes 42 constitute hollow cylindrical tubes of preciselyarranged hexagonal rings of bonded carbon atoms having a structurecharacterized by a semiconducting electronic state. The cylindricaltubes may have a diameter ranging from about 0.5 nm to many nanometersas limited by the dimensions of the active area 34 and, if multi-wall,may have a sidewall thickness of several nanometers. The carbonnanotubes 42 may, without limitation, be multi-wall nanotubes resemblingconcentric cylinders or, alternatively, may constitute single-wallnanotubes.

The carbon nanotubes 42 extend upward from the corresponding activeareas 34 with a vertical or, at the least, a substantially verticalorientation as the invention contemplates minor deviations fromverticality (e.g., tilting) in growth direction may occur. Thelengthening carbon nanotubes 42 will closely spatially follow or conformto the adjacent vertical surface of the gate electrode 25. The verticaldirectionality of nanotubes 42 is expected to be particularly evidentfor plasma enhanced CVD in which the nanotubes 42 may lengthen in thedirection of an electric field present in the open spaces 39. Althoughnot wishing to be bound by theory, it is believed that van der Waalsforces will operate to attract the lengthening carbon nanotubes 42 tothe vertical surface of the insulating layer 38.

The CVD process or plasma-enhanced CVD process synthesizing the carbonnanotubes 42 relies on any suitable gaseous or vaporized carbonaceousreactant(s) including, but not limited to, carbon monoxide (CO),ethylene (C₂H₄), methane (CH₄), acetylene (C₂H₂), xylene (C₆H₄(CH₃)₂), amixture of C₂H₂ and ammonia (NH₃), a mixture of C₂H₂ and nitrogen (N₂),a mixture of C₂H₂ and hydrogen (H₂), and a mixture of ethanol (C₂H₆O)and N₂, supplied under growth conditions suitable for promoting carbonnanotube growth on the catalytic material forming the catalyst pads 16.Substrate 12 may be heated to a temperature adequate to promote and/orhasten CVD growth. The reactant(s) are delivered or supplied to eachactive area 34, where the reactant chemically reacts with the catalystmaterial to nucleate carbon nanotubes 42 and to sustain their growthfollowing nucleation. In particular, the reactant(s) freely flow withoutsignificant flow constrictions in the volume defined by the open spaces39 between word lines 26 to the active areas 34 for participating in thesynthesis of semiconducting carbon nanotubes 42. Synthesis is expectedto occur by addition of carbon atoms at an interface between each of thecarbon nanotubes 42 and the corresponding active area 34. The catalystmaterial of the catalyst pads 16 participates in and promotes carbonnanotube synthesis without itself being transformed or consumed by thechemical reaction transpiring at its exposed surface by reducing theactivation energy of the reaction forming semiconducting carbonnanotubes 42.

Either during nanotube synthesis or by a higher temperature thermalanneal after nanotube synthesis is completed and the reactant(s) are nolonger present, atoms originating from the catalyst material or from amaterial alloyed with the catalyst material may be diffused into aregion of length of the semiconducting carbon nanotubes 42. The presenceof the diffused species would increase the electrical conductivity ofthe semiconducting carbon nanotubes 42 in the diffused region of length,which is preferably approximately equal to the thickness of insulatinglayer 20. Typically, the diffusion would be performed at a temperaturehigher than the temperature during nanotube synthesis, whichcontrollably promotes diffusion only after the carbon nanotubes 42 aresynthesized. In other words, the conduction-increasing species is nottransferred from the active areas 34 of catalyst material into thecarbon nanotubes 42 during synthesis, which might otherwise compromisethe semiconducting properties of the nanotubes 42 for lengths ofnanotubes 42 horizontally aligned with the gate electrode 25.

With reference to FIGS. 8A and 8B in which like reference numerals referto like features in FIGS. 7A and 7B and at a subsequent fabricationstage, a fill layer 46 of a dielectric material is conformally depositedby a conventional process to fill the open spaces 39 between adjacentword lines 26 and any spaces, if present, between adjacentsemiconducting carbon nanotubes 42. The fill layer 46 may be, forexample, SiO₂ deposited by a CVD process or a spin-on glasscharacterized by a low dielectric constant. Fill layer 46 stabilizes theposition of the carbon nanotubes 42 either contacting or proximate toinsulating layer 38. Fill layer 46 is polished flat by CMP or any othersuitable planarization technique and another insulating layer 48, suchas SiO₂, is deposited on planarized fill layer 46. The polishing removesfill layer 46 to a depth sufficient to also shorten lengthy nanotubes 42projecting above the horizontal plane of an upper surface of insulatinglayer 24.

With reference to FIGS. 9A and 9B in which like reference numerals referto like features in FIGS. 8A and 8B and at a subsequent fabricationstage, source/drain contacts 50 electrically coupled with thesemiconducting carbon nanotubes 42 and gate contacts 52 electricallycoupled with the gate electrode 25 are formed by defining contactopenings in insulating layer 48 by a standard lithographic and etchprocess, optionally lining the contact openings with one or morebarrier/adhesion enhancement layers (not shown), and blanket depositinga metal, such as tungsten, to fill the contact openings with metalplugs, and then removing the excess overburden of conductive material byany suitable planarization technique, such as CMP. The free ends orleading tips of certain of the carbon nanotubes 42 are exposed when thecontact openings are etched and project vertically into the bulk of thecorresponding contacts 50 after the contact openings are filled withcorresponding metal plugs to form source/drain contacts 50.

The resultant structure is a memory circuit including memory devicestructures 54 arranged as an interconnected row and column array offield effect transistors each including a gate defined by gate electrode25, source/drain contact 50, a second source/drain contact defined bycatalyst pad 16 and the stripes of conductive layer 14, a gatedielectric defined by insulating layer 38, and a semiconducting channelregion defined along the length of the semiconducting carbon nanotubes42. Each completed device structure 54 is electrically coupled foroperation in the memory circuit with other device structures 54supported on adjacent regions of the substrate 12.

A plurality of capacitors 55 and a plurality of capacitors 56, showndiagrammatically in FIGS. 9A and 9B, are electrically coupled with draincontacts 50 in different word lines 26 for charge storage. Thisstructure is described in more detail, for example, in S. Arai et al.,IEEE IEDM 01-403 (2001), which is hereby incorporated by referenceherein in its entirety. Current flows selectively from the catalyst pad16 through the carbon nanotubes 42 for storing charge in the capacitor56 when a sufficient electrical voltage is applied to an appropriateword line 26 from one of conductive lines 57, 59. The memory devicestructures 54 are electrically coupled by the stripes of conductivelayer 14 (e.g., bit lines 27) and the gate electrodes 25 (e.g., wordlines 26), which are used to read and write the binary state of thememory device structures 54.

With reference to FIGS. 10A and 10B in which like reference numeralsrefer to like features in FIGS. 1-9 and in accordance with analternative embodiment of the invention, a memory device structure 58includes a second patterned layer of catalyst pads 22 provided at alocation generally overlying the gate conductor 18 (FIGS. 1A and 1B) andunderlying the insulating layer 24 (FIGS. 2A and 2B) in the layer stack10. The catalytic material constituting catalyst pads 22 is anyelectrically conducting material capable of nucleating and supportingthe synthesis or growth of carbon nanotubes 44 when exposed toappropriate reactants under chemical reaction conditions suitable topromote nanotube growth. Suitable catalytic materials for catalyst pads22 are described above with regard to catalyst pads 16. One or morecarbon nanotubes 44, of which at least a fraction of multiple carbonnanotubes 44 have a structure characterized by a conducting electronicstate, are grown or synthesized by a CVD growth process on catalyst pads22. The synthesis conditions characterizing the CVD growth process maybe modified to preferentially grow conducting carbon nanotubes 44. Thelength of carbon nanotubes 44 is typically about 10 nm to about 100 nm.Gate contacts 60, which replace gate contacts 52, are electricallycoupled with the carbon nanotubes 44 and, hence, are electricallycoupled with a corresponding one of gate electrodes 25.

In one embodiment of the invention, contact openings are defined ininsulating layer 24, fill layer 46, and insulating layer 48 by astandard lithographic and etch process to expose the catalyst pads 22subsequent to a fabrication stage corresponding to FIGS. 8A and 8B. Thecarbon nanotubes 44 are synthesized by the CVD growth process and thecontact openings are filled with metal plugs to provide the gatecontacts 60. The carbon nanotubes 44 project vertically into the bulk ofthe corresponding gate contacts 60 after the contact openings are filledwith corresponding metal plugs.

Insulating layer 24 is shortened horizontally such that the verticaledge of the layer 24 is withdrawn from the vertical surface of gateelectrode 25 overlying the active area 34. The reduced width of theinsulating layer 24 also reduces the likelihood that a free end of bentcarbon nanotubes 42 (FIGS. 8A and 8B) formed on catalyst pad 16 cancontact a vertical surface of insulating layer 24 and thereby be spacedaway from the vertical surface of the gate electrode 25.

With reference to FIGS. 11A and 11B in which like reference numeralsrefer to like features in FIGS. 1-10, conductive layer 14 of a logicdevice structure 74 is etched at a fabrication stage equivalent to thefabrication stage of FIGS. 1A and 1B to define discontinuities in thelayer striping, which are ultimately filled with portions of fill layer46. As a result and in cooperation with the striping of the conductinglayer 14 visible in FIGS. 4A and 4B, adjacent device structures 74 areelectrically isolated unless intentionally interconnected in thecompleted device structure to form a logic circuit. The semiconductordevice structures 74 are constructed from layer stack 10 (FIGS. 2A and2B) modified by patterning the gate conductor 18 using standardlithographic and etch processes to define an array of substantiallyidentical gate electrodes 66 configured as spaced apart islands. Thegate electrodes 66 are arranged as columns and rows of an array in whichadjacent gate electrodes 66 are separated by one of a correspondingplurality of open spaces 39 that supply reactant flow paths to acorresponding one of the active areas 34 during growth of thesemiconducting carbon nanotubes 42.

Source/drain contacts 68 electrically coupled with one end of thesemiconducting carbon nanotubes 42, metal posts 80 electrically coupledwith a conducting pad 76 to define a source connection via conductinglayer 14 with an opposite end of the semiconducting carbon nanotubes 42,and gate contacts 70 electrically coupled with each gate electrode 66are formed by standard lithographic and etch processes in insulatinglayer 48. One truncated stripe of conducting layer 14 extendshorizontally beneath each gate electrode 66 from the corresponding metalpost 80 to electrically couple with the associated catalyst pad 16. Thetruncated stripe of conducting layer 14, the catalyst pad 16 and themetal post 80 collectively form a second source/drain contact.Conductive metallization lines 82, 84, and 86 interconnect thesource/drain contacts 68, the gate contacts 70 and the metal posts 80,respectively, for operation as a logic circuit as understood by personsof ordinary skill in the art.

With reference to FIGS. 12A and 12B in which like reference numeralsrefer to like features in FIGS. 11A and 11B and in accordance with analternative embodiment of the invention, a logic device structure 88further includes catalyst pads 76 each formed from a catalyst materialcapable of supporting the growth of at least one conducting carbonnanotube 90. Catalyst pads 76, which are electrically conducting, areintroduced into layer stack 10 by the process forming catalyst pads 16.Carbon nanotubes 90, of which at least a fraction have a conductingelectronic state, are synthesized at a fabrication stage correspondingto the fabrication stage of FIGS. 7A and 7B at which the semiconductingcarbon nanotubes 42 and, optionally, carbon nanotubes 44 (FIGS. 10A and10B) are synthesized. Source/drain contacts 92 formed by a standardlithographic and etch process in the insulating layer 48 areelectrically coupled with the conducting carbon nanotubes 90. The freeends of the carbon nanotubes 90 extend into the bulk of the source/draincontacts 92. The source/drain contacts 68, the gate contacts 70 and thesource/drain contacts 92 are interconnected by conductive metallizationlines 82, 84, and 86, respectively, for operation as a logic circuit asunderstood by persons of ordinary skill in the art. The inventioncontemplates that the gate contacts 70 may be also formed partially byconducting carbon nanotubes (not shown but similar to carbon nanotubes44 depicted in FIGS. 10A and 10B).

While the invention has been illustrated by a description of variousembodiments and while these embodiments have been described inconsiderable detail, it is not the intention of the applicants torestrict or in any way limit the scope of the appended claims to suchdetail. Additional advantages and modifications will readily appear tothose skilled in the art. Thus, the invention in its broader aspects istherefore not limited to the specific details, representative apparatusand method, and illustrative example shown and described. Accordingly,departures may be made from such details without departing from thespirit or scope of applicants' general inventive concept.

1. A method for fabricating a circuit including an array ofsemiconductor device structures, the method comprising: forming astacked structure including a conducting layer, a plurality of firstcatalyst pads each coupled electrically with the conductive layer, agate electrode layer, and an insulating layer separating the gateelectrode layer from the plurality of first catalyst pads; partitioningthe stacked structure to define a plurality of gate electrodes in thegate electrode layer to define the array in which adjacent gateelectrodes are separated by a reactant path and each of the plurality offirst catalyst pads is at least partially exposed to the reactant pathat a location proximate a vertical sidewall of a corresponding one ofthe plurality of gate electrodes; and directing a reactant by thereactant path to each of the plurality of first catalyst pads forsynthesizing at least one semiconducting carbon nanotube on each of theplurality of first catalyst pads from the reactant by a chemical vapordeposition process.
 2. The method of claim 1 further comprising: forminga plurality of second catalyst pads on the gate electrode; andsynthesizing at least one conducting carbon nanotube on each of theplurality of second catalyst pads.
 3. The method of claim 1 furthercomprising: defining an active area of each of the plurality of firstcatalyst pads.
 4. The method of claim 3 wherein defining the active areafurther comprises: covering a first portion of each of the plurality offirst catalyst pads with a mask; and etching a second portion of each ofthe plurality of first catalyst pads selective to the mask such that thefirst portion defines the active area.
 5. The method of claim 4 whereinthe mask is a temporary spacer that is removed from the device structureafter etching.
 6. The method of claim 2 further comprising: forming aplurality of first contacts each electrically coupled with a first endof the at least one semiconducting carbon nanotube synthesized on acorresponding one of said plurality of first catalyst pads.
 7. Themethod of claim 6 wherein the array is characterized by semiconductordevice structures arranged in a plurality of rows and a plurality ofcolumns, and the method further comprises: patterning the conductinglayer to define a plurality of bit lines each electricallyinterconnecting the first contact of all semiconductor devices locatedin each of the plurality of rows of the array.
 8. The method of claim 7wherein the array is characterized by semiconductor device structuresarranged in a plurality of rows and a plurality of columns, and each ofthe plurality of gate electrodes defines a word line for the pluralityof semiconductor devices located in a corresponding one of the pluralityof columns of the array.
 9. The method of claim 6 further comprising:forming a plurality of second contacts each electrically coupled with asecond end of the at least one semiconducting carbon nanotubesynthesized on a corresponding one of the plurality of first catalystpads.
 10. The method of claim 9 further comprising: electricallyinterconnecting the plurality of gate electrodes, the plurality of firstcontacts, and the plurality of second contacts as a logic circuit. 11.The method of claim 9 further comprising: electrically interconnectingthe plurality of gate electrodes, the plurality of first contacts, andthe plurality of second contacts as a memory circuit.
 12. The method ofclaim 1 further comprising: diffusing an electrical-conductivityenhancing substance from each of the first plurality of catalyst padsinto an adjacent end of the at least one semiconducting carbon nanotubesthereon.
 13. The method of claim 12 wherein diffusing theelectrical-conductivity enhancing substance occurs after directing thereactant by the reactant path to each of the plurality of first catalystpads.